Method for writing to magnetic random access memory

ABSTRACT

A method of manufacturing an array of magnetic random access memory cells includes writing to a magnetic random access memory cell. The writing to a memory cell includes determining an optimum write current for the array of memory cells, and applying the optimum write current to a first memory cell in the array. A first read current is applied to the first memory cell to determine whether a magnetic orientation of the first memory cell has changed in response to applying the optimum write current. A second write current is applied to the first memory cell when the magnetic orientation of the first memory cell has not changed. The second write current is different from the optimum write current. A second read current is applied to the first memory cell to determine whether the magnetic orientation of the first memory cell changed in response to applying the second write current.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Continuation of U.S. application Ser. No.16/902,134, filed Jun. 15, 2020, now U.S. Pat. No. 11,238,911, which isa Continuation of U.S. application Ser. No. 16/377,036, filed Apr. 5,2019, now U.S. Pat. No. 10,685,693, which claims priority to U.S.Provisional Patent Application No. 62/698,565, filed Jul. 16, 2018, theentire disclosures of each of which are incorporated herein byreference.

BACKGROUND

A magnetic random access memory (MRAM) offers comparable performance tovolatile static random access memory (SRAM) and comparable density withlower power consumption to volatile dynamic random access memory (DRAM).Compared to non-volatile memory (NVM) flash memory, an MRAM offers muchfaster access times and suffers minimal degradation over time, whereas aflash memory can only be rewritten a limited number of times. An MRAMcell is formed by a magnetic tunneling junction (MTJ) comprising twoferromagnetic layers that are separated by a thin insulating barrier,and operates by tunneling of electrons between the two ferromagneticlayers through the insulating barrier.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic view of a MTJ MRAM cell according to anembodiment of the present disclosure.

FIG. 1B is a schematic cross sectional view of the MTJ film stackaccording to an embodiment of the present disclosure.

FIGS. 2A, 2B, and 2C show schematic cross sectional views of magneticlayers of the MTJ film stack according to an embodiment of the presentdisclosure.

FIGS. 3A and 3B show a memory operation of MTJ cell.

FIGS. 3C and 3D show a memory operation of MTJ cell.

FIG. 4 shows an MRAM array.

FIG. 5A shows the optimal write current distribution for an array ofmagnetic random access memory cells.

FIG. 5B shows the error rate of an array of magnetic random accessmemory cells at different write currents.

FIG. 5C shows the error rate of an array of magnetic random accessmemory cells at hopping write currents.

FIG. 5D compares the error rate of an array of magnetic random accessmemory cells of multiple application of write current at a constantwrite current and hopping write currents.

FIG. 6 illustrates a hopping-write current iterative process accordingto an embodiment of the disclosure.

FIG. 7 is a flowchart illustrating a method of writing to an MRAM cellaccording to embodiments of the disclosure.

FIG. 8 illustrates a circuit for a hopping-write scheme according to anembodiment of the disclosure.

FIG. 9 is a flowchart illustrating a method of determining an optimumwrite current for an array of MRAM cells according to an embodiment ofthe present disclosure.

FIG. 10 shows a programmable circuit for setting the step of theiterative write current change and the range of write current accordingto an embodiment of the disclosure.

FIG. 11 shows a functional test circuit according to an embodiment ofthe disclosure.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides manydifferent embodiments, or examples, for implementing different featuresof the invention. Specific embodiments or examples of components andarrangements are described below to simplify the present disclosure.These are, of course, merely examples and are not intended to belimiting. For example, dimensions of elements are not limited to thedisclosed range or values, but may depend upon process conditions and/ordesired properties of the device. Moreover, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed interposing the first and second features, suchthat the first and second features may not be in direct contact. Variousfeatures may be arbitrarily drawn in different scales for simplicity andclarity. In the accompanying drawings, some layers/features may beomitted for simplification.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The device may be otherwise oriented (rotated 90 degrees orat other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly. In addition, the term“made of” may mean either “comprising” or “consisting of” Further, inthe following fabrication process, there may be one or more additionaloperations in/between the described operations, and the order ofoperations may be changed. In the present disclosure, a phrase “one ofA, B and C” means “A, B and/or C” (A, B, C, A and B, A and C, B and C,or A, B and C), and does not mean one element from A, one element from Band one element from C, unless otherwise described.

The MRAM cells include a film stack of multiple layers includingmagnetic layers. In some MRAM devices, depending on the magnetic design,one or more non-magnetic spacer layers may need to be inserted betweenmagnetic layers to optimize the magnetic interaction. In someembodiments, one or more diffusion barrier layers may be inserted intothe film stack to minimize adverse diffusion phenomenon. Further, in theMTJ MRAM cells, other than the tunneling barrier layer, every layerwithin the film stack needs to be conductive to maximize a read/writewindow.

Material for a seed layer, a spacer layer and/or a diffusion barrierlayer is appropriately selected in some embodiments to provide a desiredspecific crystalline structure and orientation, and does not disrupt themagnetic interactions of the functional layers. Further, the seed layer,the spacer layer and the diffusion barrier layer should be smooth,non-orientation specific (amorphous), conductive and non-magnetic.

The magnetic tunneling function of the MTJ MRAM cells depends on aspecific crystalline structure and an orientation of the MTJ films. Inorder to have the desired crystalline structure and orientation in theMTJ films, the whole film stack needs to be grown on a smooth,amorphous, conductive, non-magnetic seed layer. Among various materials,tantalum (Ta) is the most widely used as the seed layer, which can beeasily grown as a smooth and amorphous layer. Further, a non-magneticspacer layer, such as molybdenum (Mo), is often used in the MTJ films.Other than tantalum (Ta) and molybdenum (Mo), cobalt (Co), platinum(Pt), iridium (Ir), and/or nickel (Ni) may be used as a seed layer or aspacer layer.

The crystalline magnetic layers are grown from the crystalline latticeof the MgO layer, or the crystalline magnetic layers use the crystallinelattice as a growth template.

FIG. 1A is a schematic view of a MTJ MRAM cell according to anembodiment of the present disclosure. The MTJ film stack 100 is disposedbetween a lower metal layer Mx and an upper metal layer My of asemiconductor device. The metal layers Mx and My are used to connect oneelement to another element in a semiconductor device formed at adifferent level above a substrate. Further, the lower metal layer Mx iscoupled to a switching device SW, which can be formed by a MOS FETincluding, but not limited to, a planar MOS FET, a fin FET, agate-all-around (GAA) FET, or any other switching devices. A controlterminal (e.g., a gate terminal of FET) of the switching device iscoupled to a word line. One of the terminals of the switching device SWis coupled to the lower metal layer Mx and the other terminal is coupledto the source line, which is a fixed potential (e.g., the ground) insome embodiments. The upper metal layer My is coupled to a bit line. Insome embodiments, the switching device SW is disposed between the uppermetal layer My and the bit line.

The MTJ film stack 100 includes a first electrode layer 110 coupled tothe lower metal layer Mx and a second electrode layer 155 coupled to theupper metal layer My. An MTJ functional layer 101 is disposed betweenthe first electrode layer 110 and the second electrode layer 155, asshown in FIG. 1B.

The MTJ functional layer 101 includes a second pinned magnetic layer130, a free magnetic layer 140, and a tunneling barrier layer 135 madeof a non-magnetic material and disposed between the second pinnedmagnetic layer 130 and the free magnetic layer 140. The free magneticlayer 140 and the second pinned magnetic layer 130 include one or moreferromagnetic materials that can be magnetically oriented, respectively.The free magnetic layer 140 is configured such that the magneticorientation can be changed, or rotated, by exposure to an externalmagnetic field. The second pinned magnetic layer 130 is configured suchthat the magnetic orientation is fixed and will not respond to a typicalmagnetic field. In some embodiments, the thickness of the free magneticlayer 140 is in a range from about 0.8 nm to about 1.5 nm. In someembodiments, the thickness of the second pinned layer 130 is in a rangefrom about 0.8 nm to about 2.0 nm.

The tunneling barrier layer 135 includes a relatively thin oxide layercapable of electrically isolating the free magnetic layer 140 from thesecond pinned magnetic layer 130 at low potentials and capable ofconducting current through electron tunneling at higher potentials. Insome embodiments, the tunneling barrier layer 135 is made of magnesiumoxide (MgO) having a thickness in a range from about 0.5 nm to about 1.2nm.

In some embodiments, the MTJ functional layer 101 further includes anantiferromagnetic layer 125, as shown in FIG. 1B. The anti-ferromagneticlayer 125 is used to fix the magnetic orientation of the second pinnedmagnetic layer 130. The antiferromagnetic layer 125 includes ruthenium(Ru) or any other suitable antiferromagnetic material. In someembodiments, the thickness of the antiferromagnetic layer 125 is in arange from about 0.4 nm to about 1.0 nm.

The MTJ functional layer 101 further includes a first pinned magneticlayer 120 including one or more magnetic materials, as shown in FIG. 1B.

The second pinned magnetic layer 130 includes multiple layers ofmagnetic materials. In some embodiments, as shown in FIG. 2A, the secondpinned magnetic layer 130 includes four layers 1301, 1302, 1303 and1304, where layer 1304 is in contact with the tunneling barrier layer135 and layer 1301 is in contact with the antiferromagnetic layer 125.In some embodiments, layer 1301 (the bottommost layer) includes a layerof Co. In some embodiments, a thickness of the cobalt layer is in arange from about 0.4 nm to about 0.6 nm. In some embodiments, layer 1302includes a multilayer structure of cobalt (Co) and platinum (Pt). Thethickness of the cobalt layer is in a range of about 0.3 nm to about 0.6nm and a thickness of the platinum layer is in a range from about 0.2 nmto about 0.5 nm. The thickness of the cobalt layer can be the same as orgreater than the platinum layer. The cobalt layers and the platinumlayers are alternately stacked such that the total thickness of layer1302 is in a range from about 2.0 nm to about 5.0 nm in someembodiments. In certain embodiments, layer 1301 is the cobalt layer andlayer 1302 is the multilayer of the cobalt layers and the platinumlayers as set forth above. In this disclosure, an “element” layergenerally means that the content of the “element” is more than 99 atomic%.

Layer 1303 is a spacer layer. In some embodiments, the spacer layerincludes Ta, Mo, Co, Pt, Ir, and/or Ni. The thickness of the spacerlayer 1303 is in a range from about 0.2 nm to about 0.5 nm in someembodiments. The layer 1304 is a cobalt iron boron (CoFeB) layer, acobalt/palladium (CoPd) layer and/or a cobalt iron (CoFe) layer. Thethickness of the layer 1304 is in a range from about 0.8 nm to about 1.5nm in some embodiments.

The first pinned magnetic layer 120 includes multiple layers of magneticmaterials. In some embodiments, as shown in FIG. 2B, the first pinnedmagnetic layer 120 includes two layers 1201 and 1202, where layer 1202is in contact with the antiferromagnetic layer 125. In some embodiments,layer 1201 includes a multilayer structure of cobalt (Co) and platinum(Pt). In some embodiments, a thickness of the cobalt layer is in a rangefrom about 0.3 nm to about 0.6 nm and a thickness of the platinum layeris in a range from about 0.2 nm to about 0.5 nm. The thickness of thecobalt layer can be the same as or greater than the platinum layer. Thecobalt layers and the platinum layers are alternately stacked such thatthe total thickness of the layer 1201 is in a range from about 5.0 nm toabout 10.0 nm in some embodiments. The layer 1202 includes a cobaltlayer having a thickness in a range from about 0.4 nm to about 0.6 nm insome embodiments.

The free magnetic layer 140 includes a cobalt iron boron (CoFeB) layer,a cobalt/palladium (CoPd) layer and/or a cobalt iron (CoFe) layer havinga thickness in a range from about 1.0 nm to about 2.0 nm in someembodiments. In other embodiments, the free magnetic layer 140 includesmultiple layers of magnetic materials. In some embodiments, as shown inFIG. 2C, the free magnetic layer 140 includes three layers 1401, 1402and 1403, where the layer 1401 is in contact with the tunneling barrierlayer 135. Layers 1401 and 1403 are a cobalt iron boron (CoFeB) layer, acobalt/palladium (CoPd) layer and/or a cobalt iron (CoFe) layer having athickness in a range from about 1.0 nm to about 2.0 nm in someembodiments. The layer 1402 is a spacer layer. In some embodiments, thespacer layer includes Ta, Mo, Co, Pt, Ir, and/or Ni. The thickness ofthe spacer layer 1402 is in a range from about 0.2 nm to about 0.6 nm insome embodiments.

In some embodiments, the MTJ functional layer 101 further includes aseed layer 115 formed on the first electrode layer 110, a capping layer145 formed on the free magnetic layer 140, and a diffusion barrier layer150 formed on the capping layer 145, as shown in FIG. 1B. The cappinglayer 145 is made of a dielectric material, such as magnesium oxide oraluminum oxide, and has a thickness in a range from about 0.5 nm toabout 1.5 nm in some embodiments. The first electrode layer 110 is madeof a conductive material, such as a metal, to reduce the resistance ofthe first pinned magnetic layer 120, especially for programming. Thesecond electrode layer 155 is also made of a conductive material, suchas a metal, to reduce the resistivity during reading.

In some embodiments, the seed layer 115 includes a Pt layer and or Ptlayer and a Ta layer. The seed layer 115 is for a growth of the firstpinned magnetic layer 120, and generally has a smooth surfacemorphology, a high electric conductivity, and is substantially free ofdiffusion into the pinned magnetic layer 120. The thickness of the seedlayer 115 is in a range from about 0.5 nm to about 20 nm in someembodiments, and is in a range from about 1.0 nm to about 10 nm in otherembodiments. The seed layer 115 is amorphous in some embodiments.

In some embodiments, the diffusion barrier layer 150 includes a tantalumlayer and/or a binary alloy layer of iridium and tantalum. The diffusionbarrier layer for the MTJ film stack generally has a super smoothsurface morphology, a high electric conductivity, and is substantiallyeffective in alleviating diffusion issues. Further, the diffusionbarrier layer should also be tolerant to a low level of oxidationwithout significant conductivity degradation. The thickness of thediffusion barrier layer 150 is in a range from about 0.1 nm to about 10nm in some embodiments, and is in a range from about 0.5 nm to about 5.0nm in other embodiments.

In some embodiments, the spacer layer 1303 and/or the spacer layer 1402include an iridium layer and/or a binary alloy layer of iridium andtantalum. A spacer layer for the MTJ film stack is generally required tohave a super smooth surface morphology and a high electric conductivityand to be substantially free from a diffusion issue. Further, the spacerlayer should also be tolerant to a low level of oxidation withoutsignificant degradation of its conductivity. The thickness of the spacerlayers 1303 and/or 1402 is in a range from about 0.1 nm to about 10 nmin some embodiments, and is in a range from about 0.5 nm to about 5.0 nmin other embodiments.

In some embodiments, the first electrode layer 110 is formed on thelower metal layer Mx made of, for example, Cu, Al, W, Co, Ni, and/or analloy thereof; and the upper metal layer My made of, for example, Cu,Al, W, Co, Ni, and/or an alloy thereof, and is formed on the secondelectrode layer 155.

The pinned magnetic layer, the free magnetic layer, theantiferromagnetic layer, and the spacer/barrier layer can be formed byCVD, PVD or ALD or any other suitable film deposition method. Thetunneling barrier layer can also be formed by CVD, PVD or ALD or anyother suitable film deposition method. The first and second electrodelayers can also be formed by CVD, PVD, ALD, or electro plating, or anyother suitable film deposition method.

In some embodiments, the first electrode layer 110 is formed on thelower metal layer Mx, which has been patterned, the seed layer 115 isformed on the first electrode layer 110, the first pinned magnetic layer120 is formed on the seed layer 115, the antiferromagnetic layer 125 isformed on the first pinned magnetic layer 120, the second pinnedmagnetic layer 130 is formed on the antiferromagnetic layer 125, thetunneling barrier layer 135 is formed on the second pinned magneticlayer 130, the free magnetic layer 140 is formed on the tunnelingbarrier layer 135, the capping layer 145 is formed on the free magneticlayer 140, the diffusion barrier layer 150 is formed on the cappinglayer 145, and the second electrode layer 155 is formed on the diffusionlayer 150. One or more lithography and etching operations are performedto pattern the stacked layer into the MTJ film stack for each memorycell. In other embodiments, trenches for memory cells are formed in adielectric layer and the MTJ film is formed in the trenches.

In some embodiments, the MRAM cells are formed over a dielectricmaterial disposed over the substrate. In some embodiments, the substrateincludes silicon (Si) and/or silicon oxide or other suitablesemiconductor material. Transistors, driver circuits, logic circuits orany other electronic devices are formed by semiconductor materials andintegrated with the MRAM cells.

FIGS. 3A-3D show a memory operation of MTJ cell. As shown in FIGS.3A-3D, the MTJ cell includes a pinned magnetic layer 10, a tunnelingbarrier layer 15 and a free magnetic layer 20. The pinned magnetic layer10 corresponds to the second pinned magnetic layer 130 or thecombination of the first pinned magnetic layer 120, theantiferromagnetic layer 125 and the second pinned magnetic layer 130 ofFIG. 1B. The tunneling barrier layer 15 corresponds to the tunnelingbarrier layer 135 of FIG. 1B and the free magnetic layer 20 correspondsto the free magnetic layer 140 of FIG. 1B. In FIGS. 3A-3D, the remaininglayers are omitted. A current source 30 is coupled to the MTJ structurein series.

In FIG. 3A, the pinned magnetic layer 10 and the free magnetic layer 20are magnetically oriented in opposite directions. In some embodiments,the spin directions of the pinned magnetic layer 10 and the freemagnetic layer 20 are parallel to the film stack direction(perpendicular to the surface of the films). In FIG. 3B, the pinnedmagnetic layer 10 and the free magnetic layer 20 are magneticallyoriented in the same direction. In other embodiments, the spindirections of the pinned magnetic layer 10 and the free magnetic layer20 are perpendicular to the film stack direction (parallel with thesurface of the films), as shown in FIGS. 3C and 3D. In FIG. 3C, thepinned magnetic layer 10 and the free magnetic layer 20 are magneticallyoriented in opposite directions, while in FIG. 3D, the pinned magneticlayer 10 and the free magnetic layer 20 are magnetically oriented in thesame direction.

If the same current value I_(C) is forced to flow through the MTJ cellby the current source 30, it is found that the cell voltage V₁ in thecase of FIG. 3A (or FIG. 3C) is larger than the cell voltage V₂ in thecase of FIG. 3B (or FIG. 3D), because the resistance of anopposite-oriented MTJ cell shown in FIG. 3A (or FIG. 3C) is greater thanthe resistance of a same-oriented MTJ cell shown in FIG. 3B (or FIG.3D). Binary logic data (“0” and “1”) can be stored in a MTJ cell andretrieved based on the cell orientation and resulting resistance.Further, since the stored data does not require a storage energy source,the cell is non-volatile.

FIG. 4 shows an MRAM array 50. Each memory cell includes a MTJ cell Mcand a transistor Tr, such as a MOS FET. The gate of the transistor Tr iscoupled to a word line WL and a drain (or a source) of the transistor Tris coupled to one end of the MTJ cell Mc, and another end of the MTJcell is coupled to a bit line BL. Further, a signal line PL forprogramming is provided adjacent to the MTJ cells.

A memory cell is read by asserting the word line of that cell, forcing areading current through the bit line BL of that cell, and then measuringthe voltage on that bit line BL. For example, to read the state of atarget MTJ cell, the word line WL is asserted to turn ON the transistorTr. The free magnetic layer of the target MTJ cell is thereby coupled tothe fixed potential SL, e.g., the ground through the transistor Tr.Next, the reading current is forced on the bit line BL. Since only thegiven reading transistor Tr is turned ON, the reading current flowsthrough the target MTJ cell to the ground. The voltage of the bit lineBL then measured to determine the state (“0” or “1”) of the target MTJcell. In some embodiments, as shown in FIG. 4, each MTJ cell has onereading transistor Tr. Therefore, this type of MRAM architecture iscalled 1T1R. In other embodiments, two transistors are assigned to oneMTJ cell, forming a 2T1R system. Other cell array configurations can beemployed.

Current MRAM testing and their field applications (eMRAM, cache, DRAM,and flash replacement) use a constant bias (voltage or current)condition during write/read testing and field applications. Because ofthe high sensitivity of the MRAM stacks to inherent process variations,large die-to-die variation across the wafer, block-to-block variationacross the die, and bit-to-bit variation across the block are observed.Different dies (on different wafer locations, e.g. center die vs edgedie), different blocks and individual bits of MRAM cells very often havesignificantly different write/read windows and fail the test ofwrite/read window/margin at a very high rate if a constant write/readbias is used (note that for a large array of MRAM that can be ofpractical usage hundreds of megabytes (MB) to gigabytes (GB), thedie-chip could be as large as the full reticle field at 22 mm×32 mm). Awhole-wafer population-averaged constant write/read window is too narrowto be practical and is close to un-usable for manufacturing, testing,and field application if not corrected. There is a need for improvementof the write operation because significant “optimum write current”differences are often observed on bits within a small array.

A hopping algorithm (in contrast to a constant write current) isemployed in the execution of each write command, to further reduce thewrite failure rate in operations and improve yield in embodiments of thepresent disclosure.

In the first step of the functional test, the “hopping” mode in thewrite algorithm will be turned off in some embodiments. In this step, anadjusted and optimized write/read current will be found and set, basedon the test result on a particular cell population.

Each MRAM cell has an optimum write current (Iopt). The optimum writecurrent for the MRAM cells in an array varies in accordance with aGaussian distribution, as shown in FIG. 5A. In this embodiment, the Ioptis given in units of μA. When the write current deviates from theoptimum write current, the error rate may increase exponentially.Because the optimum write current for a given magnetic random accessmemory cell may significantly deviate from the optimum write current forthe array, applying the optimum write current for the array may notcause the magnetic orientation of the given magnetic random accessmemory cell to change. Therefore, the application of the write currentmay be applied multiple times in attempt to change the magneticorientation. As shown in FIG. 5B, repeating the application of writecurrent five times provides an error rate where the given memory celldoes not change orientation. The Y-axis in the graph shown in FIG. 5B islogarithmic, and the X-axis is in units of μA. Thus, it is readilyapparent that a slight change in Iopt causes a big difference in theerror rate.

In embodiments of the present disclosure, multiple different writecurrents are applied to a given MRAM cell in a hopping scheme. As shownin FIG. 5C, where the Y-axis is a logarithmic scale and the X-axis is inunits of μA, the error rate is reduced by two orders of magnitude usingthe write-current hopping scheme compared to merely repeating theapplication of the same write current when the magnetic orientation ofthe MRAM is not changed. FIG. 5D compares the error rate of magneticrandom access memory cells having multiple applications of write currentat a constant write current and hopping write currents where the current(I) is in units of μA. The hopping scheme will be explained in moredetail with respect to FIG. 6.

The write current set by the first step of the function test is thepopulation-averaged Iopt. Within the cell population, there are MRAMcells whose Iopt are significantly different from this populationaverage. These cells will have a high error rate when written withcurrent set this way.

In embodiments of the present disclosure, a write process with multipleapplications of the write current using a set of varying currents isused. This set of write currents will be centered on thepopulation-averaged value set in the first step and covering a variationrange. This variation range can be determined and set based on the errorrate analysis of the population in the second step of the functionaltest. The multiple shots will hop through a search pattern in the range.The multiple-shot “hopping” scheme so determined is used in the writeprocess in field operation of the array of MRAM cells.

A write process with multiple applications of write current uses a setof varying write currents in embodiments of the disclosure. The multiplewrite current applications hop through a search pattern as shown in FIG.6. Fewer devices will fail using the hopping write scheme. In thehopping write scheme, the set of currents will be centered around thepopulation-averaged value set in the first step and covering a variationrange. This variation range/step can be determined and set based on an“Iopt” analysis of the population in the second step of the functionaltest.

FIG. 6 illustrates a hopping-write current iterative process accordingto an embodiment of the disclosure. Step Δi indicates a difference inwrite current in μA for a given write operation, while ΔI indicates thetotal range in μA between the values of the highest and the lowest writecurrents. In this embodiment, the first write current Wrt 1 is theoptimum write current for the array. The optimum write current for thearray was previously determined during functional testing of the MRAMarray. After applying the optimum write current Wrt 1, a read current isapplied to determine whether the magnetic orientation of the MRAM cellhas changed. The read current is fixed in some embodiments. The readcurrent is determined during the functional testing. In someembodiments, a fixed read current is set for die, block, or array,depending on different design schemes.

If the magnetic orientation has changed as a result of the applicationof the optimum write current, the MRAM cell passes (Pass) and is good.If the magnetic orientation of the MRAM cell has not changed, then asecond write current Wrt 2 is applied. The value of the second writecurrent Wrt 2 is different from the optimum write current Wrt 1. In someembodiments, the second write current Wrt 2 is less than the optimumwrite current Wrt 1, in other embodiments, the second write current Wrt2 is greater than the optimum write current Wrt 1. After applying thesecond write current Wrt 2, a read current is applied to determinewhether the magnetic orientation of the MRAM cell has changed. If themagnetic orientation has changed as a result of the application of thesecond write current Wrt 2, the MRAM cell is good. If the magneticorientation of the MRAM cell has not changed, then a third write currentWrt 3 is applied. The value of the third write current Wrt 3 isdifferent from the optimum write current Wrt 1 and the second writecurrent Wrt 2. The third write current Wrt 3 is either less than orgreater than the optimum write current Wrt 1 depending on the secondwrite current Wrt 2. The third write current Wrt 3 is the opposite ofsecond write current Wrt 2 in that if the second write current Wrt 2 isless than the optimum write current Wrt 1 the third write current Wrt 3is greater than the optimum write current Wrt 1 and if the second writecurrent Wrt 2 is greater than the optimum write current Wrt 1 the thirdwrite current Wrt 3 is less than the optimum write current Wrt 1. Insome embodiments the magnitude Δi of the difference between the secondwrite current Wrt 2 and the optimum write current Wrt 1 is the same asthe magnitude Δi of the difference of the between the third writecurrent Wrt 3 and the optimum write current Wrt 1.

After applying the third write current Wrt 3, a read current is appliedto determine whether the magnetic orientation of the MRAM cell haschanged. If the magnetic orientation has changed as a result of theapplication of the third write current Wrt 3, the MRAM cell is good. Ifthe magnetic orientation of the MRAM cell has not changed, then a fourthwrite current Wrt 4 is applied. The value of the fourth write currentWrt 4 is different from the optimum write current Wrt 1, the secondwrite current Wrt 2, and the third write current Wrt 3. The fourth writecurrent Wrt 4 is either less than or greater than the optimum writecurrent Wrt 1 depending on the third write current Wrt 3. The fourthwrite current Wrt 4 is the opposite of third write current Wrt 3 in thatif the third write current Wrt 3 is less than the optimum write currentWrt 1 the fourth write current Wrt 4 is greater than the optimum writecurrent Wrt 1 and if the third write current Wrt 3 is greater than theoptimum write current Wrt 1 the fourth write current Wrt 4 is less thanthe optimum write current Wrt 1. The magnitude 2Δi of the differencebetween the fourth write current Wrt 4 and the optimum write current Wrt1 is greater than magnitude Δi of the difference between the third writecurrent Wrt 3 and the optimum write current Wrt 1 and the difference Δibetween the second write current Wrt 2 and the optimum write current Wrt1.

After applying the fourth write current Wrt 4, a read current is appliedto determine whether the magnetic orientation of the MRAM cell haschanged. If the magnetic orientation has changed as a result of theapplication of the fourth write current Wrt 4, the MRAM cell is good. Ifthe magnetic orientation of the MRAM cell has not changed, then a fifthwrite current Wrt 5 is applied. The value of the fifth write current Wrt5 is different from the optimum write current Wrt 1, the second writecurrent Wrt 2, the third write current Wrt 3, and the fourth writecurrent Wrt 4. The fifth write current Wrt 5 is either less than orgreater than the optimum write current Wrt 1 depending on the fourthwrite current Wrt 4. The fifth write current Wrt 5 is the opposite offourth write current Wrt 4 in that if the fourth write current Wrt 4 isless than the optimum write Wrt 1 current the fifth write current Wrt 5is greater than the optimum write current Wrt 1 and if the fourth writecurrent Wrt 4 is greater than the optimum write current Wrt 1 the fifthwrite current Wrt 5 is less than the optimum write current Wrt 1. Themagnitude 2Δi of the difference between the fifth write current Wrt 5and the optimum write current Wrt 1 is greater than magnitude Δi of thedifference between the third write current Wrt 3 and the optimum writeWrt 1 current and the difference Δi between the second write current Wrt2 and the optimum write current Wrt 1. In some embodiments the magnitude2Δi of the difference between the fifth write current Wrt 5 and theoptimum write current Wrt 1 is the same as the magnitude 2Δi of thedifference between the fourth write current Wrt 4 and the optimum writecurrent Wrt 1.

After applying the fifth write current Wrt 5, a read current is appliedto determine whether the magnetic orientation of the MRAM cell haschanged. If the magnetic orientation has changed as a result of theapplication of the fifth write current Wrt 5, the MRAM cell is good. Ifthe magnetic orientation of the MRAM cell has not changed, then the MRAMcell is rejected. In this embodiment, five iterations of write currentare applied to determine whether the MRAM cell is good or a reject. Insome embodiments, difference in the fourth write current Wrt 4 and thefifth write current Wrt 5 is the total range in the magnitude ΔI of thewrite currents applied to the MRAM cell.

As shown in FIG. 6, the hopping scheme is centered around the MRAM arrayIopt write current Wrt 1, alternating between write currents having amagnitude less than and greater than Iopt write current. Methodsaccording to this disclosure are not limited to five iterations todetermine whether an MRAM is acceptable. In other embodiments, three orfour iterations of applying the write current are applied. In otherembodiments, more than five iterations of applying the write currentsare applied.

FIG. 7 is a flowchart illustrating a method 200 of writing to an MRAMcell according to an embodiment of the present disclosure. In operationS210, an optimum write current for an array of MRAM cells is determined.The optimum write current is applied to an MRAM cell in operation S220.Next, a read current is applied to the MRAM cell in S230. Whether themagnetic orientation of the MRAM cell has changed is determined inoperation S240. If the magnetic orientation has not changed, then adifferent write current is applied to the MRAM cell in operation S250and the application of the read current is repeated, as shown in FIG. 7.If the magnetic orientation has not changed, the application ofdifferent values of write current is repeated until either the magneticorientation changes or a set number of iterations of applying differentwrite currents is obtained. When either the magnetic orientation haschanged or a set number of iterations of applying different writecurrents is obtained, the application of write current is stopped inoperation S260.

In some embodiments, the method 200 includes iteratively repeating theapplication of write current in operation S250 and read current inoperation S230 if the magnetic orientation of the first magnetic randomaccess memory cell has not changed, wherein the iterative application ofwrite current and read current is stopped if the magnetic orientation ofthe first magnetic random access memory cell has changed, and whereinthe write current at each application of the write current is differentthan any other write current. In some embodiments, each iteration ofapplication of write current alternates between greater than and lessthan the optimum write current.

In some embodiments, each successive write current that is less than theoptimum write current is less than a preceding write current that isless than the optimum write current, and each successive write currentthat is greater than the optimum write current is greater than apreceding write current that is greater than the optimum write current.For example, as shown in FIG. 6, in an embodiment, the Iopt for an arrayof MRAM cells is determined to be 45 μA. If the magnetic orientation ofthe MRAM cell does not change after applying a write current of 45 μA, awrite current of 35 μA is applied. If the magnetic orientation of theMRAM cell does not change after applying the write current of 35 μA athird write current of 55 μA is applied If the magnetic orientation ofthe MRAM cell does not change after applying the third write current of55 μA a fourth write current of 25 μA is applied. If the magneticorientation of the MRAM cell does not change after applying the fourthwrite current of 25 μA a fifth write current of 65 μA is applied. Inthis embodiment, if five iterations is not sufficient to change themagnetic orientation, the MRAM cell is rejected. In this embodiment, thestep of Δi of each iteration from the Iopt is 10 μA, and the overallrange ΔI of write currents applied to the MRAM cell from the lowestwrite current value to highest write current value is 40 μA. As shown inFIG. 6, in some embodiments, write currents applied after theapplication of the optimum write current alternate between writecurrents that are less than the optimum write current and greater thanthe optimum write current. In an embodiment, the optimum write currentis at a midpoint of values of all the alternating write currents.

FIG. 8 illustrates a portion of a circuit 300 for performing thehopping-write scheme according to an embodiment of the disclosure. TheIopt for the chip, array, module, or block of MRAM cells is determinedduring the functional test of the chip, array, module, or block of MRAMcells in some embodiments. A Gaussian-type distribution of Iopt isdetermined by the functional test in some embodiments. A current source310 applies a write current to the array of MRAM cells, a block of MRAMcells, or an MRAM cell. A current source 320 applies a read current toverify whether the MRAM cell(s) changed magnetic orientation. In someembodiments, the same current source applies both the write current andthe read current. A comparator or sense amplifier 330 is included in thecircuit 300 in some embodiments. If the magnetic orientation changes,the write process is stopped. If the magnetic orientation of the MRAMcell does not change (fails to write), a level shifter 340 changes thecurrent level. A controller 350 controls the current sources 310, 320and the level shifter 340. In some embodiments, the Iopt, the magnitudeof the current step Δi for each iteration of changing the write current,the total range of current change ΔI for all the iterations, and thenumber of iterations are determined during the functional test of thearray, and the controller sets these values in the circuit 300.

FIG. 9 is a flowchart illustrating a method 400 of determining anoptimum write current for an array of MRAM cells according to anembodiment of the present disclosure. In operation S410, a write currentis applied to one of a plurality of MRAM cells. Next, a read current isapplied to the MRAM cell in S420. Whether the magnetic orientation ofthe MRAM cell has changed is determined in operation S430. If themagnetic orientation has not changed then a different write current isapplied to the MRAM cell in operation S440 and the application of theread current is repeated, as shown in FIG. 9. If the magneticorientation has not changed, the application of different values ofwrite current is repeated until the magnetic orientation changes. Whenthe magnetic orientation has changed, the value of write current thatcaused the change of magnetic orientation of the MRAM cell is determinedin S450. Then the steps of applying the write current S410, applying theread current S420, determining whether the magnetic orientation of theMRAM cell has changed S430, and if the magnetic orientation of the MRAMcell has not changed applying a different write current to the MRAM cellS440 are repeated in S460. Next, whether the magnetic orientation ofeach of the plurality of MRAM cells has changed is determined in S470.If not all of the plurality of MRAM cells has changed its magneticorientation, the step of applying a different write current is repeated.The initial write current applied is a write current at the low end ofthe predicted range of suitable write currents. If the initial writecurrent does not cause the magnetic orientation to change, themagnitudes of subsequent applied write currents are increased in astepwise manner until the magnetic orientation of the MRAM cell ischanged. If the magnetic orientation of each of the plurality of MRAMcells has changed, the optimum write current is determined in S480 basedon the write currents to change the magnetic orientation of each of theplurality of MRAM cells. In some embodiments, the optimum write currentis the average of the write currents to change the magnetic orientationof each of the plurality of MRAM cells.

In some embodiments, the parameters determined during the functionaltest, including the the Iopt, the magnitude of the current step Δi foreach iteration of changing the write current, the total range of currentchange ΔI for all the iterations, and the number of iterations areburned into the MRAM array circuit by burning fuse or antifuses in thecircuit. The burn-in permanently sets the parameters. The parameters aredifferent for each block in an array of MRAM cells in some embodiments.Thus, each block in an array of MRAM cells can be optimized. Forexample, FIG. 10 shows an antifuse block in conjunction withprogrammable circuits for setting the step of the iterative writecurrent change and the range of write current according to an embodimentof the disclosure. As shown in FIG. 10, a programming multiplexer inputburns the appropriate antifuses in the antifuse block to set theparameters of the MRAM array circuit. For example, the Iopt of the chip,array, module, or block of MRAM cells is burned-in after the functionaltest determines Iopt for the chip, array, module, or block of MRAMcells. The functional test and burn-in may be performed on any sizegrouping of MRAM cells.

FIG. 11 shows a circuit, such as a functional test circuit 500,according to some embodiments of the disclosure. The functional testcircuit 500 includes an array 510 including a plurality of blocks 520.Each block 520 includes a plurality of magnetic random access memorycells. The functional test circuit 500 includes a current source 530configured to provide a plurality of different write currents and a readcurrent to each of the magnetic random access memory cells in the blocks520 of the array 510. The functional test circuit 500 according to someembodiments, also includes a controller 540 configured to control theapplication of different write currents from the current source 530 toeach of the magnetic random access memory cells in each block 520 anddetermine whether the magnetic orientation of each of the magneticrandom access memory cells has changed in response to each applicationof the write current. The controller 540 is further configured tocontrol the current source 530 so that each application of write currentalternates between greater than and less than a first write currentapplied to each of the magnetic random access memory cells, to stop theapplication of the write current to each magnetic random access memorycell when it is determined that the magnetic orientation of eachmagnetic random access memory cell has changed, and to determine anaverage of the values of the write currents that cause the magneticorientation to change for the magnetic random access memory cells ineach block 520 of the array 510.

In some embodiments, the controller 540 is configured to set the Iopt,the magnitude of the current step Δi for each iteration of changing thewrite current, the total range of current change ΔI for all theiterations, and the number of iterations in the circuit 500. In someembodiments, the controller 540 is configured to isolate certain MRAMcells and blocks 520 in the array by burning fuses or antifuses.

Using the zigzag hopping write pattern of the present disclosure, thetime used to a successful write will be shorter. In addition, fewerdevices will fail with this new “hopping” write scheme. In someembodiments, a two orders of magnitude reduction of failing MRAM cellsis obtained by using the hopping write scheme of the present disclosure.In some embodiments, the failure rate of the MRAM cells is reduced to1×10⁻⁶ or less using the hopping write scheme of the present disclosure.Thus, the present disclosure provides increased yield of semiconductordevices.

An embodiment of the disclosure is a method of manufacturing an array ofmagnetic random access memory cells, including writing to a magneticrandom access memory cell. The writing to a magnetic random accessmemory cell includes determining an optimum write current for the arrayof magnetic random access memory cells, and applying the optimum writecurrent to a first magnetic random access memory cell in the array. Afirst read current is applied to the first magnetic random access memorycell to determine whether a magnetic orientation of the first magneticrandom access memory cell has changed in response to the applying theoptimum write current. A second write current is applied to the firstmagnetic random access memory cell when the magnetic orientation of thefirst magnetic random access memory cell has not changed. The secondwrite current is different from the optimum write current. A second readcurrent is applied to the first magnetic random access memory cell todetermine whether the magnetic orientation of the first magnetic randomaccess memory cell has changed in response to the applying the secondwrite current. In an embodiment, the method includes applying a thirdwrite current to the first magnetic random access memory cell when themagnetic orientation of the first magnetic random access memory cell hasnot changed after application of the second write current, wherein thethird write current is different from the optimum write current and thesecond write current, and applying a third read current to the firstmagnetic random access memory cell to determine whether the magneticorientation of the first magnetic random access memory cell has changedin response to the applying the third write current. In an embodiment,the second write current is greater than the optimum write current andthe third write current is less than the optimum write current. In anembodiment, the second write current is less than the optimum writecurrent and the third write current is greater than the optimum writecurrent. In an embodiment, the method includes iteratively repeatingapplication of a write current and a read current when the magneticorientation of the first magnetic random access memory cell has notchanged, wherein the iterative application of the write current and theread current is stopped when the magnetic orientation of the firstmagnetic random access memory cell has changed, and wherein the writecurrent at each application of the write current is different from anyother write current. In an embodiment, each iteration of application ofwrite current alternates between greater than and less than the optimumwrite current. In an embodiment, each successive write current that isless than the optimum write current is less than a preceding writecurrent that is less than the optimum write current, and each successivewrite current that is greater than the optimum write current is greaterthan a preceding write current that is greater than the optimum writecurrent. In an embodiment, write currents applied after the applicationof the optimum write current alternate between write currents that areless than the optimum write current and write currents that are greaterthan the optimum write current. In an embodiment, the optimum writecurrent is at a midpoint of values of all the alternating writecurrents.

Another embodiment of the disclosure is a method of manufacturing anarray of magnetic random access memory cells, including determining anoptimum write current for the array of magnetic random access memorycells. Determining the optimum write current includes (a) applying afirst write current to one of a plurality of magnetic random accessmemory cells in the array of magnetic random access memory cells, and(b) applying a first read current to the one of a plurality of magneticrandom access memory cells to determine whether a magnetic orientationof the one of a plurality of magnetic random access memory cells haschanged in response to the applying the write current. In operation (c)a second write current is applied to the one of a plurality of magneticrandom access memory cells when that the magnetic orientation of the oneof a plurality of magnetic random access memory cells has not changed,wherein the second write current is different from the optimum writecurrent. Then in operation (d) a second read current is applied to theone of a plurality of magnetic random access memory cells to determinewhether the magnetic orientation of the one of a plurality of magneticrandom access memory cells has changed in response to the applying thesecond write current, wherein the second read current has a same valueas the first read current. Next, a third write current is applied to theone of a plurality of magnetic random access memory cells when themagnetic orientation of the one of a plurality of magnetic random accessmemory cells has not changed after application of the second writecurrent, wherein the third write current is different from the optimumwrite current and the second write current in operation (e). Inoperation (f) a third read current is applied to the one of theplurality of magnetic random access memory cells to determine whetherthe magnetic orientation of the one of a plurality of magnetic randomaccess memory cells has changed in response to the applying the thirdwrite current, wherein the third read current has a same value as thefirst and second read currents. Then, in operation (g) application ofwrite current and read current is iteratively applied when the magneticorientation of the one of the plurality of magnetic random access memorycells has not changed, wherein the iteratively repeating application ofwrite current and read current is stopped when the magnetic orientationof the one of a plurality of magnetic random access memory cells haschanged, wherein the write current at each application of the writecurrent is different from any other write current, and wherein the firstwrite current has a first magnitude and magnitudes of subsequentapplications of write currents are increased in a stepwise manner.Subsequently, in operation (h) a value of the write current that causedthe magnetic orientation of the magnetic random access memory cell tochange is determined. Operations (a) through (h) are repeated for eachof the plurality of magnetic random access memory cells in the array ofmagnetic random access memory cells in operation (i). The optimum writecurrent is determined based on the write currents determined for each ofthe plurality of magnetic random access memory cells in operation (j).In an embodiment, the optimum write current is an average of the writecurrents that caused the magnetic orientations of the magnetic randomaccess memory cells to change for each the plurality of magnetic randomaccess memory cells. In an embodiment, the method includes writing to amagnetic random access memory cell in the array of magnetic randomaccess memory cells, wherein the writing to the magnetic random accessmemory cell includes: applying the optimum write current to a selectedmagnetic random access memory cell in the array, applying a cell writingread current to the selected magnetic random access memory cell todetermine whether the magnetic orientation of the selected magneticrandom access memory cell has changed in response to the applying theoptimum write current, applying a cell writing write current to theselected magnetic random access memory cell when the magneticorientation of the selected magnetic random access memory cell has notchanged in response to the applying the optimum write current, anditeratively repeating application of the cell writing write current andcell writing read current when the magnetic orientation of the selectedmagnetic random access memory cell has not changed. The iterativeapplication of the cell writing write current and the cell writing readcurrent is stopped when the magnetic orientation of the selectedmagnetic random access memory cell has changed, and the cell writingwrite current at each application of the cell writing write current isdifferent from any other cell writing write current. Then, the selectedmagnetic random access memory cell is isolated if the magneticorientation of the selected magnetic random access memory cell does notchange after a set number of iterations of applying the cell writingwrite current. In an embodiment, the selected magnetic random accessmemory cell is isolated by burning a fuse or antifuse. In an embodiment,a magnitude of a first application of the cell writing write current isgreater than a magnitude of the optimum write current and a magnitude ofa second application of the cell writing write current is less than themagnitude of the optimum write current. In an embodiment, a magnitude ofa first application of the cell writing write current is less than theoptimum write current and a magnitude of a second application of asecond cell writing write current is greater than the magnitude of theoptimum write current. In an embodiment, magnitudes of each iteration ofapplication of cell writing write current alternates between greaterthan and less than the optimum write current. In an embodiment, cellwriting write currents applied after application of the optimum writecurrent alternate between a cell writing write current that is less thanthe optimum write current and a cell writing write current that isgreater than the optimum write current. In an embodiment, cell writingwrite currents applied after application of the optimum write currentalternate between a cell writing write current that is less than theoptimum write current and a cell writing write current that is greaterthan the optimum write current, each successive cell-writing writecurrent that is less than the optimum write current is less than apreceding cell-writing write current that is less than the optimum writecurrent, and each successive cell-writing write current that is greaterthan the optimum write current is greater than a preceding cell-writingwrite current that is greater than the optimum write current.

Another embodiment of the disclosure is a method of writing to amagnetic random access memory cell, including applying a first writecurrent to a first magnetic random access memory cell. Whether themagnetic orientation of the first magnetic random access memory cell haschanged in response to the applying the first write current isdetermined. A second write current is applied to the first magneticrandom access memory cell after it is confirmed that the magneticorientation of the first magnetic random access memory cell has notchanged, wherein the second write current is different from the firstwrite current. Whether the magnetic orientation of the first magneticrandom access memory cell has changed in response to the applying thesecond write current is determined. A third write current is applied tothe first magnetic random access memory cell after it is confirmed thatthe magnetic orientation of the first magnetic random access memory cellhas not changed after application of the second write current, whereinthe third write current is different from the first write current andthe second write current. Whether the magnetic orientation of the firstmagnetic random access memory cell has changed is determined in responseto the applying the third write current. In an embodiment, the methodincludes repeating the application of the write current until themagnetic orientation of the first magnetic random access memory cell haschanged or a certain number of applications of write current isachieved, wherein a value of the write current applied during eachapplication of write current is different.

Another embodiment of the disclosure is a method of writing to amagnetic random access memory cell, including iteratively applying writecurrents to a first magnetic random access memory cell and determiningwhether the magnetic orientation of the first magnetic random accessmemory cell has changed in response to each application of the writecurrent. A value of the write current applied during each application ofthe write current is different. Each iteration of the application of thewrite current alternates between greater than and less than a firstwrite current applied to the first magnetic random access memory cell.The iterative application of the write current is stopped when it isdetermined that the magnetic orientation of the first magnetic randomaccess memory cell has changed.

Another embodiment of the disclosure is a method of writing to aplurality of magnetic random access memory cells in an array of magneticrandom access memory cells, including iteratively applying writecurrents to a first magnetic random access memory cell in the array anddetermining whether the magnetic orientation of the first magneticrandom access memory cell has changed in response to each application ofthe write current. A value of the write current applied during eachapplication of write current is different. Each iteration of applicationof the write current alternates between greater than and less than afirst write current applied to the first magnetic random access memorycell. The iterative application of the write current is stopped when itis determined that the magnetic orientation of the first magnetic randomaccess memory cell has changed or a set number of applications of writecurrent to the first magnetic random access memory cell is performed.Write currents are iteratively applied to a second magnetic randomaccess memory cell in the array and whether the magnetic orientation ofthe second magnetic random access memory cell has changed in response toeach application of the write current is determined. A value of thewrite current applied during each application of the write current isdifferent. Each iteration of the application of the write currentalternates between greater than and less than a first write currentapplied to the second magnetic random access memory cell. The iterativeapplication of the write current is stopped when it is determined thatthe magnetic orientation of the second magnetic random access memorycell has changed or a set number of applications of the write current tothe second magnetic random access memory cell is performed.

Another embodiment of the disclosure is a method including applying afirst write current to a first magnetic random access memory cell in afirst block of magnetic random access memory cells in an array ofmagnetic random access memory cells. Whether the magnetic orientation ofthe first magnetic random access memory cell has changed in response tothe applying the first write current is determined. A second writecurrent is applied to the first magnetic random access memory cell ifthe magnetic orientation of the first magnetic random access memory cellhas not changed, wherein the second write current is different from thefirst write current. Whether the magnetic orientation of the firstmagnetic random access memory cell has changed in response to theapplying the second write current is determined. A third write currentis applied to the first magnetic random access memory cell if themagnetic orientation of the first magnetic random access memory cell hasnot changed after the application of the second write current, whereinthe third write current is different from the first write current andthe second write current. Whether the magnetic orientation of the firstmagnetic random access memory cell has changed in response to theapplying the third write current is determined. The application of thewrite current is repeated until the magnetic orientation of the firstmagnetic random access memory cell has changed or a certain number ofapplications of write current is achieved, wherein a value of the writecurrent applied during each application of write current is different.The value of the write current that causes the magnetic orientation ofthe first magnetic random access memory cell is determined. The applyingthe first write current is repeated to each of a plurality of magneticrandom access memory cells in the first block of magnetic random accessmemory cells in the array of magnetic random access memory cells. Thedetermination of whether the magnetic orientation of each of theplurality of magnetic random access memory cell has changed in responseto the applying the first write current is repeated for each of theplurality of magnetic random access memory cells in the first block ofmagnetic random access memory cells. The applying of the second writecurrent is repeated for each of the plurality of magnetic random accessmemory cells in the first block in which the magnetic orientation hasnot changed, wherein the second write current is different from thefirst write current. The determination of whether the magneticorientation of each magnetic random access memory cell has changed inresponse to the applying the second write current is repeated for eachmagnetic random access memory cell to which the second write current isapplied. The applying of the third write current to each of theplurality of magnetic random access memory cells in the first block inwhich the magnetic orientation has not changed after the application ofthe second write current is repeated, wherein the third write current isdifferent from the first write current and the second write current. Thedetermination of whether the magnetic orientation of each of theplurality of the magnetic random access memory cells has changed inresponse to the applying the third write current is repeated for each ofthe plurality of magnetic random access memory cell to which the thirdwrite current is applied. The application of write current is repeateduntil the magnetic orientation of each of the magnetic random accessmemory cells has changed or a certain number of applications of thewrite current is achieved. The value of the write current applied duringeach application of write current to a specific magnetic random accessmemory cell is different. The value of the write current that causes themagnetic orientation of each of magnetic random access memory cells inthe first block is determined. An average of the values of the writecurrents that cause the magnetic orientation to change for the magneticrandom access memory cells in the first block is determined. In anembodiment, the average write current for the first block is set for thefirst block during a burn-in operation of the array. In an embodiment,the array includes a plurality of blocks of magnetic random accessmemory cells. In an embodiment, the method is repeated for each block ofmagnetic random access memory cells in the array. In an embodiment, eachof blocks of magnetic random access memory cells of the plurality ofblocks of magnetic random access memory cells have different averagewrite currents. In an embodiment, magnetic random access memory cellsthat do not change magnetic orientation after a set number ofapplication of write currents are isolated from the respective block ofmagnetic random access memory cells by burning a fuse or anti-fuse. Insome embodiments, blocks of random access memory cells that includegreater than a set number of isolated random access memory cells areisolated from the array by burning a fuse or anti-fuse.

Another embodiment of the disclosure is a circuit including a currentsource configured to apply a plurality of different write currents and aread current to magnetic random access memory cells in an array ofmagnetic random access memory cells. The circuit includes a controllerconfigured to determine an optimum write current for the array ofmagnetic random access memory cells, determine whether the magneticorientation of the magnetic random access memory cells have changed inresponse to the applying the different write currents, and control theapplication of the write current from the current source to the magneticrandom access memory cells.

Another embodiment of the disclosure is a circuit including a currentsource configured to provide a plurality of different write currents toa magnetic random access memory cell. The circuit includes a controllerconfigured to control the iterative application of the write currentsfrom the current source to the magnetic random access memory cell anddetermine whether the magnetic orientation of the magnetic random accessmemory cell has changed in response to each application of the writecurrent. The controller is further configured to control the currentsource so that each application of the write current alternates betweengreater than and less than a first write current applied to the magneticrandom access memory cell, and to stop the application of write currentwhen it is determined that the magnetic orientation of the firstmagnetic random access memory cell has changed.

Another embodiment of the disclosure is a functional test circuitincluding an array including a plurality of blocks, each block includinga plurality of magnetic random access memory cells. The circuit includesa current source configured to provide a plurality of different writecurrents and a read current to each of the magnetic random access memorycells. The circuit includes a controller configured to control theapplication of different write currents from the current source to eachof the magnetic random access memory cells and determine whether themagnetic orientation of each of the magnetic random access memory cellshas changed in response to each application of the write current. Thecontroller is further configured to control the current source so thateach application of write current alternates between greater than andless than a first write current applied to each of the magnetic randomaccess memory cells, to stop the application of the write current toeach magnetic random access memory cell when it is determined that themagnetic orientation of each magnetic random access memory cell haschanged, and to determine an average of the values of the write currentsthat cause the magnetic orientation to change for the magnetic randomaccess memory cells in each block of the array.

It will be understood that not all advantages have been necessarilydiscussed herein, no particular advantage is required for allembodiments or examples, and other embodiments or examples may offerdifferent advantages.

The foregoing outlines features of several embodiments or examples sothat those skilled in the art may better understand the aspects of thepresent disclosure. Those skilled in the art should appreciate that theymay readily use the present disclosure as a basis for designing ormodifying other processes and structures for carrying out the samepurposes and/or achieving the same advantages of the embodiments orexamples introduced herein. Those skilled in the art should also realizethat such equivalent constructions do not depart from the spirit andscope of the present disclosure, and that they may make various changes,substitutions, and alterations herein without departing from the spiritand scope of the present disclosure.

What is claimed is:
 1. A method of writing to a magnetic random accessmemory cell, comprising: iteratively applying write currents to themagnetic random access memory cell; determining whether a magneticorientation of the magnetic random access memory cell has changed inresponse to each application of the write current, wherein a value ofthe write current applied during each application of the write currentis different, and each iteration of the application of the write currentalternates between greater than and less than a first write currentapplied to the magnetic random access memory cell; and stopping theiterative application of the write current when it is determined thatthe magnetic orientation of the magnetic random access memory cell haschanged.
 2. The method according to claim 1, the first write current isat a midpoint between successive iterations of the application of thewrite current alternating between greater than and less than the firstwrite current applied to the magnetic random access memory cell.
 3. Themethod according to claim 1, wherein a difference between eachsuccessive application of the write current greater than the first writecurrent and the first write current is greater than a precedingapplication of the write current greater than the first write current.4. The method according to claim 1, wherein an absolute value of thedifference between each successive application of the write current lessthan the first write current and the first write current is greater thana preceding application of the write current less than the first writecurrent.
 5. The method according to claim 1, wherein a read current isapplied to the magnetic random access memory cell to determine whetherthe magnetic orientation of the magnetic random access memory cell haschanged.
 6. The method according to claim 5, wherein the read current isa fixed current.
 7. The method according to claim 1, wherein 2 to 5write currents are applied to the magnetic random access memory cell. 8.A method of writing to a plurality of magnetic random access memorycells in an array of magnetic random access memory cells, comprising:iteratively applying write currents to a first magnetic random accessmemory cell in the array; determining whether a magnetic orientation ofthe first magnetic random access memory cell has changed in response toeach application of the write current to the first magnetic randomaccess memory cell, wherein a value of the write current applied duringeach application of write current is different, and each iteration ofapplication of the write current alternates between greater than andless than a first write current applied to the first magnetic randomaccess memory cell; stopping the iterative application of the writecurrent to the first magnetic random access memory cell when it isdetermined that the magnetic orientation of the first magnetic randomaccess memory cell has changed or a set number of applications of writecurrent to the first magnetic random access memory cell is performed;iteratively applying write currents to a second magnetic random accessmemory cell in the array; determining whether a magnetic orientation ofthe second magnetic random access memory cell has changed in response toeach application of the write current is determined, wherein a value ofthe write current applied to the second magnetic random access memorycell during each application of the write current is different, and eachiteration of the application of the write current to the second magneticrandom access memory cell alternates between greater than and less thana first write current applied to the second magnetic random accessmemory cell; and stopping the iterative application of the write currentto the second magnetic random access memory cell when it is determinedthat the magnetic orientation of the second magnetic random accessmemory cell has changed or a set number of applications of the writecurrent to the second magnetic random access memory cell is performed.9. The method according to claim 8, wherein the first write currentapplied to the first magnetic random access memory cell is at a midpointbetween successive iterations of the application of the write currentalternating between greater than and less than the first write currentapplied to the first magnetic random access memory cell.
 10. The methodaccording to claim 8, wherein a magnitude of each successive applicationof the write current greater than the first write current applied to thefirst and second magnetic random access memory cells is greater than apreceding application of the write current greater than the first writecurrent.
 11. The method according to claim 8, wherein a magnitude ofeach successive application of the write current less than the firstwrite current applied to the first and second magnetic random accessmemory cells is less than a preceding application of the write currentless than the first write current.
 12. The method according to claim 8,wherein a read current is applied to the first and second magneticrandom access memory cells to determine whether the magnetic orientationof the magnetic random access memory cell has changed.
 13. The methodaccording to claim 12, wherein the read current is a fixed current. 14.The method according to claim 8, wherein 2 to 5 write currents areapplied to the first and second magnetic random access memory cells. 15.The method according to claim 8, further comprising performingfunctional testing of the array of magnetic random access memory cellsto determine an optimum write current.
 16. The method according to claim15, wherein the first write current applied to the first magnetic randomaccess memory cell is the optimum write current.
 17. A method,comprising: applying a first write current to a first magnetic randomaccess memory cell in a first block of magnetic random access memorycells in an array of magnetic random access memory cells; determiningwhether a magnetic orientation of the first magnetic random accessmemory cell has changed in response to the applying the first writecurrent; applying a second write current to the first magnetic randomaccess memory cell if the magnetic orientation of the first magneticrandom access memory cell has not changed, wherein the second writecurrent is different from the first write current; determining whetherthe magnetic orientation of the first magnetic random access memory cellhas changed in response to the applying the second write current;applying a third write current to the first magnetic random accessmemory cell if the magnetic orientation of the first magnetic randomaccess memory cell has not changed after the application of the secondwrite current, wherein the third write current is different from thefirst write current and the second write current; determining whetherthe magnetic orientation of the first magnetic random access memory cellhas changed in response to the applying the third write current;repeating the applying the write current until the magnetic orientationof the first magnetic random access memory cell has changed or a certainnumber of applications of write current is achieved, wherein a value ofthe write current applied during each application of write current isdifferent; determining the value of the write current that causes themagnetic orientation of the first magnetic random access memory cell tochange; repeating the applying a first write current to each of aplurality of magnetic random access memory cells in the first block ofmagnetic random access memory cells in the array of magnetic randomaccess memory cells; repeating the determining whether a magneticorientation of each of the plurality of magnetic random access memorycells has changed in response to the applying the first write currentfor each of the plurality of magnetic random access memory cells in thefirst block of magnetic random access memory cells; repeating theapplying the second write current for each of the plurality of magneticrandom access memory cells in the first block in which the magneticorientation has not changed, wherein the second write current isdifferent from the first write current; repeating the determiningwhether the magnetic orientation of each magnetic random access memorycell has changed in response to the applying the second write currentfor each magnetic random access memory cell to which the second writecurrent is applied; repeating the applying the third write current toeach of the plurality of magnetic random access memory cells in thefirst block in which the magnetic orientation has not changed after theapplication of the second write current, wherein the third write currentis different from the first write current and the second write current;repeating the determining whether the magnetic orientation of each ofthe plurality of the magnetic random access memory cells has changed inresponse to the applying the third write current for each of theplurality of magnetic random access memory cell to which the third writecurrent is applied; repeating the applying the write current until themagnetic orientation of each of the magnetic random access memory cellshas changed or a certain number of applications of the write current isachieved, wherein the value of the write current applied during eachapplication of write current to a specific magnetic random access memorycell is different; determining the value of the write current thatcauses the magnetic orientation of each of magnetic random access memorycells in the first block; and determining an average of the values ofthe write currents that cause the magnetic orientation to change for themagnetic random access memory cells in the first block.
 18. The methodaccording to claim 17, wherein the average of the values of the writecurrents that cause the magnetic orientation to change for the randomaccess memory cells in the first block is an optimum write current, themethod further comprising: applying the optimum write current to a firstmagnetic random access memory cell in a second block of magnetic randomaccess memory cells in the array of magnetic random access memory cells.19. The method according to claim 18, further comprising applying a readcurrent to the first magnetic random access memory cell in the secondblock of magnetic random access memory cells to determine whether amagnetic orientation of the first magnetic random access memory cell inthe second block has changed in response to the applying the optimumwrite current.
 20. The method according to claim 19, further comprisingapplying another write current to the first magnetic random accessmemory cell in the second block of magnetic random access memory cellswhen the magnetic orientation of the first magnetic random access memoryin the second block of magnetic random access memory cells has notchanged, wherein the another write current is different from the optimumwrite current.